Production Dispatch And Data Entry Instructions
1.1. PURPOSE: This document gives instructions to follow when dispatching production lots and entering production data.
1.2. SCOPE: This spec applies to all production steps done at CTI.
2.1. Fab management is responsible for defining the process.
2.2. Production engineers, supervisors, and operators are responsible for performing the procedures listed in this spec.
2.3. Production supervisors are responsible for keeping all appropriate records.
2.4. CTI accounting department will be responsible for determining the value of the transferred material and communicating that to the requester.
3. REFERENCED DOCUMENTS
3.1. Spec D02 - Wafer Start Procedure
3.2. CSJ spec 22-00040 - Fab Material Review Board (MRB) Procedure for all Locations
3.3. Spec Q14 - Procedure for Storage and Retrieval of Site Records
3.4. Spec E38 - Product Visual Inspection Criteria
3.5. Spec G21 - ALA 2131 Operations spec
3.6. Spec Q03 - Run Status Change Notice (RSC) Procedure
3.7. Spec S17 - Sort Area Data Preparation
4.1. Ink pen
4.2. Scrap wafer envelopes
4.3. Flat aligner
5.1. Fab2 Ingres Terminal
6. SAFETY: N/A
7. CRITICAL REQUIREMENTS: N/A
8. OPERATING PROCEDURES AND RESPONSIBILITIES
8.1. KEYBOARD BASICS
8.1.1. PF1 key: Moves cursor to the prompt at the bottom of the page, next to the commands. At the bottom of the screen, if there is a < or > sign, there are more commands than what is seen on the screen. Press <PF1> again, while the cursor is at the bottom of the page, and the other commands will appear.
8.1.2. PF2 key: Moves cursor to the next field.
8.1.3. PF3 key: Moves cursor back.
8.1.4. Tab key: Moves cursor forward from field to field without erasing contents.
8.2. LOGGING ON TO INGRES
8.2.1. If you are at the vista> prompt, type "c txsun" and press <Enter>.
8.2.2. If you are at the TELNET> prompt, type "txsun" and press <Enter>.
8.2.3. At the login: prompt type "fab2" and press <Enter>.
8.2.4. At the password prompt type "wipit" and press <Enter>.
Note: The letters in "fab2" and "wipit" must be all upper case or all lower case. It will not work if you use both upper and lower case.
8.2.5. The Master Data Processing System-Main Menu will appear on the screen with the cursor highlighting the first item on the menu.
8.2.6. Put the cursor on FAB2 Chits (for FAB 2).
8.2.7. Press <Enter>. The Cypress Semiconductor - Fab2 Area Main Menu screen will appear.
8.2.8. Type <1> and press <Enter> for the fab-wafer fab option. The Cypress historical inventory tracking system - FAB2 Main Menu will appear on the screen.
8.2.9. Type <3> and press <Enter> for the Lot Move option. This will call up the Cypress WIP Tracking System-Step Data display. This screen is used to move lots from step to step.
8.3. DISPATCHING A LOT
8.3.1. Verify the following:
220.127.116.11. All fields of the previous step on the runcard must be filled in. If previous fields are not filled, contact supervisor or LPO.
18.104.22.168. If initiating the first process step on a new runcard page, circle that page number and initial and date.
22.214.171.124. The scribe numbers on every wafer in the lot must match the lot number on the lot box and runcard.
126.96.36.199. Scan the runcard bar-code. The lot information should pop up on the screen.
Note: You may enter a runcard lot number or company initials by either typing them in or scanning them.
188.8.131.52. Count the wafers. The physical wafer count must match the wafer quantity on the runcard and on the Ingres Lot Move screen. If not, contact supervisor or LPO
184.108.40.206. The Major Step, Substep and next step on the runcard must match the Major Step, Substep and next step on Ingres. For photo operations the frontpage must match the option device type on Ingres and the runcard. If they do not, contact your supervisor or LPO and do not process the lot.
8.3.2. You must refer the lot to the supervisor if you find ANY discrepancies between the wafers, runcard, and Lot Move screen.
8.3.3. Type in your company initials and press <Enter>.
8.3.4. If necessary, select the equipment on the Lot Move screen and acknowledge minispec screens.
8.3.5. Press <PF1> to move the cursor to the bottom of the screen. Press <I> for In and <Enter> to sign the lot into the step. You MUST sign the lot into the step on the Lot Move Screen BEFORE you process the lot.
8.3.6. If the equipment is auto-downloaded, enter a checksum.
8.3.7. Process the lot.
8.3.8. Verify that all the wafers finish processing.
8.3.9. Go to the Lot Move screen.
8.3.10. Scan the runcard bar-code. The lot information should pop up on the screen.
8.3.11. Count the wafers. The physical wafer count must match the wafer quantity on the runcard and on the Ingres Lot Move screen. If it does not, contact your supervisor or LPO.
8.3.12. Flat align the wafers with the flats to the bottom. While rotating the wafers, inspect the wafer edges for nicks, chips, or cracks. If you find any damage, contact the supervisor and engineer.
8.3.13. The Major Step, Substep and next step on the runcard must match the Major Step, Substep and next step on Ingres. For photo operations the frontpage must match the option device type on Ingres and the runcard. If they do not, contact your supervisor.
8.3.14. Type your company initials. Press <Enter>. Type the number of wafers being moved out of the process. Press <PF1>. Press <0> for Out and <Enter> to sign the lot out of the step.
Note: If any errors are made before signing the lot out, you may press <PF1> then press <R> for reset or press <Q> for quit then go back into the Lot Move screen.
Note: If any errors are found after dispatching the lot, contact your supervisor.
8.3.15. Fill in the appropriate fields of the runcard.
8.3.16. The operator completing the final substep of the current process step is responsible for dispatching and transporting the lot to the next step's staging area.
8.4.1. For experiments and shortloops
If the equipment listing is not shown or the equipment needed is not listed, then notify your supervisor, LPO or an engineer to verify the correct machine before processing.
8.4.2. For lots containing the letter K.
These lots are ALA line monitors. These lots must be sent to the ALA station at each step, as printed on the runcard. The ALA personnel are responsible for completing and dispatching the K lot as per the ALA 2131 Operations spec (G21). If no ALA personnel are available to do the job due to illness or absences, the shift supervisor will be notified by the ALA team. Then the shift supervisor or operator may sign the lot off. Reasons for skipping the ALA must be included in the data collection screen. The ALA requirement for the RSC lot is covered in the Run Status Change Notice (RSC) Procedure spec (Q03).
8.4.3. To dispatch lots out of an LPCVD Furnace.
When dispatching lots in the diffusion area that are coming out of an LPCVD furnace, always log the lots out zone 1 first, zone 2 second, zone 3 third, and so on. This will insure that the data entered in engineering data collection accurately reflects the furnace.
Appendix A - Inventory Transfer Sheet
_______________ ___________ _________________ _____________
# OF WAFERS STEP IN WIP VALUE PER WAFER TOTAL VALUE
BILL TO:_____________________ BILL FROM:____________________
DEPARTMENT NO. DEPARTMENT NO.
REQUESTER DIRECTOR OF OPERATIONS
REQUESTER'S MANAGER PRODUCTION CONTROL MANAGER
Appendix B - Quality Database Information (QDB) Form
Submitted by:___________________ ___/___/___ Current step:__________________
Date: ____/____/____ Time:____:____ Lot ID#:_____________ Step:__________
Qty scrapped:_______ Qty Non-scrap:_______ Shift:______ Area:_____________
Posted:___/____/___ Appeal Date:___/___/___ Rejected:____ Accepted:____
Problem/Cause of Misprocess:
Operator Explanation of Misprocess:
spec change made:_____
Corrective Action Taken:
What prevents this error from occurring in the future:
Sign-off: (Initial and date)
Team Leader:____________________ ___/___/___
Manager:________________________ ___/___/___ QA:________________ ___/___/___\
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